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Location :
1, North Coast Drive, Singapore 757432
Department :
Manufacturing (MFG), Dry Etch (DE)
Title of project:
To review and optimize design of Electrode Static Chuck (ESC) cleaning jig to improve overall cleaning effectiveness and ergonomics, through understanding of chamber design and equipment maintenance processes.
Project Description:
In this project, students will gain 1st hand experience to understand semiconductor processes and cutting-edge equipment that are used in Dry Etch department. Students will be able to take part in the hardware maintenance work, learning about the critical Dry Etch process equipment components and learning their functions in the wafer processing flow. Students are expected to review the current cleaning jig, identify pros and cons and suggest modification to improve design with respective to productivity and ergonomics.
Deliverable:
To complete basic chamber maintenance training to gain hardware understanding of ESC design. To create a modified design of ESC cleaning jig, with prototype drawing for fabrication.
Skillset Required :
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